Sharaxaada
Epitaxial Silicon Waferama EPI Silicon Wafer, waa wafer ah lakabka crystal semiconducting oo lagu shubay dusha sare ee crystals ee substrate silikoon ee koritaanka epitaxial.Lakabka epitaxial wuxuu noqon karaa walxo la mid ah substrate by kobaca epitaxial isku mid ah, ama lakab qalaad leh tayada la doonayo gaar ah by koritaanka epitaxial kala duwan, kaas oo qaata tignoolajiyada koritaanka epitaxial waxaa ka mid ah kaydinta uumiga kiimikada CVD, dareeraha wajiga epitaxy LPE, iyo sidoo kale laydhka molecular Epitaxy MBE si loo gaaro tayada ugu sareysa ee cufnaanta cilladaha hooseeya iyo qallafsanaanta dusha sare.Silicon Epitaxial Wafers waxaa ugu horrayn loo adeegsadaa soo saarista aaladaha semiconductor-ka sareeyo, canaasiirta semiconductor ICs oo aad isugu dhafan, qalab kala duwan iyo qalab koronto, sidoo kale loo isticmaalo walxaha diode iyo transistor ama substrate IC sida nooca laba-cirifoodka, MOS iyo aaladaha BiCMOS.Intaa waxaa dheer, lakabyo badan oo epitaxial iyo filim qaro weyn EPI wafers silikoon ayaa inta badan loo isticmaalaa microelectronics, photovoltaics codsiga
gaarsiin
Epitaxial Silicon Wafers ama EPI Silicon Wafer ee Western Minmetals (SC) Corporation waxaa lagu bixin karaa cabbirka 4, 5 iyo 6 inch (100mm, 125mm, 150mm dhexroor), oo leh jihayn <100>, <111>, iska caabbinta epilayer ee <1ohm -cm ama ilaa 150ohm-cm, iyo dhumucdiisuna epilayer of <1um ama ilaa 150um, si loo qanciyo shuruudaha kala duwan ee dhamaystirka dusha sare ee Etched ama daaweynta LTO, ka buuxaan cajalad leh sanduuqa kartoon ka baxsan, ama sida gaarka ah sifada in xalka ugu fiican .
Tilmaamaha Farsamada
Epitaxial Silicon Wafersama EPI Silicon Wafer ee Western Minmetal (SC) Corporation waxaa lagu bixin karaa cabbirka 4, 5 iyo 6 inch (100mm, 125mm, 150mm dhexroor), oo leh jihayn <100>, <111>, iska caabbinta epilayer ee <1ohm-cm ama ilaa 150ohm-cm, iyo dhumucda epilayer ee <1um ama ilaa 150um, si loo qanciyo shuruudaha kala duwan ee dhamaystirka dusha sare ee etched ama daawaynta LTO, oo lagu soo buuxiyey cajalad leh sanduuq kartoon oo ka baxsan, ama sida loo habeeyey si loo xalliyo.
Astaanta | Si |
Lambarka atomiga | 14 |
Miisaanka Atoomiga | 28.09 |
Qaybta Qaybta | Metalloid |
Kooxda, Muddada, xannibaadda | 14, 3, P |
Qaab dhismeedka crystal | Dheeman |
Midabka | Cawlan madow |
Meesha dhalaalaysa | 1414°C, 1687.15 K |
Barta Karsan | 3265°C, 3538.15 K |
Cufnaanta 300K | 2.329 g/cm3 |
Iska caabin gudaha ah | 3.2E5 Ω-cm |
Lambarka CAS | 7440-21-3 |
Lambarka EC | 231-130-8 |
Maya | Walxaha | Tilmaamaha Heerka | ||
1 | Tilmaamaha Guud | |||
1-1 | Cabbirka | 4" | 5" | 6" |
1-2 | Dhexroor mm | 100±0.5 | 125±0.5 | 150±0.5 |
1-3 | Hanuuninta | <100>, <111> | <100>, <111> | <100>, <111> |
2 | Astaamaha lakabka Epitaxial | |||
2-1 | Habka Kobaca | CVD | CVD | CVD |
2-2 | Nooca Anshaxa | P ama P+, N/ama N+ | P ama P+, N/ama N+ | P ama P+, N/ama N+ |
2-3 | Dhumucda μm | 2.5-120 | 2.5-120 | 2.5-120 |
2-4 | Midnimada Dhumucda | ≤3% | ≤3% | ≤3% |
2-5 | Iska caabin Ω-cm | 0.1-50 | 0.1-50 | 0.1-50 |
2-6 | Midnimada iska caabinta | ≤3% | ≤5% | - |
2-7 | Kala guurid cm-2 | <10 | <10 | <10 |
2-8 | Tayada dusha sare | Ma jiraan jajab, ciir ama diirka liimiga ah, iwm. | ||
3 | Wax ka qabashada Astaamaha Substrate-ka | |||
3-1 | Habka Kobaca | CZ | CZ | CZ |
3-2 | Nooca Anshaxa | P/N | P/N | P/N |
3-3 | Dhumucda μm | 525-675 | 525-675 | 525-675 |
3-4 | Midnimada Dhumucda max | 3% | 3% | 3% |
3-5 | Iska caabin Ω-cm | Sida loo baahan yahay | Sida loo baahan yahay | Sida loo baahan yahay |
3-6 | Midnimada iska caabinta | 5% | 5% | 5% |
3-7 | TTV μm max | 10 | 10 | 10 |
3-8 | Qaanso μm max | 30 | 30 | 30 |
3-9 | Warp μm max | 30 | 30 | 30 |
3-10 | EPD cm-2 ugu badnaan | 100 | 100 | 100 |
3-11 | Profile Edge | Wareegay | Wareegay | Wareegay |
3-12 | Tayada dusha sare | Ma jiraan jajab, ciir ama diirka liimiga ah, iwm. | ||
3-13 | Dhammaadka dhinaca dambe | Etched ama LTO (5000± 500Å) | ||
4 | Baakad | Cajalad gudaha ah, sanduuq kartoon oo dibadda ah. |
Silicon Epitaxial WafersWaxa ugu horrayn loo adeegsadaa soo saarista aaladaha semiconductor-ka sareeyo, walxaha semiconductor aadka isku dhafan ee ICs, discrete iyo aaladaha awooda, sidoo kale loo isticmaalo walxaha diode iyo transistor ama substrate IC sida nooca laba-cirifoodka, MOS iyo aaladaha BiCMOS.Intaa waxaa dheer, lakabyo badan oo epitaxial ah iyo filim qaro weyn EPI wafers silikoon ayaa inta badan loo isticmaalaa microelectronics, sawir-qaadista iyo codsiga sawir-qaadista.
Talooyin wax iibsiga
Epitaxial Silicon Wafer