Sharaxaada
Silicon Carbide Wafer SiC, waa mid aad u adag, isku-dhafka crystalline ka samaysan ee silikoon iyo kaarboon habka MOCVD, oo soo bandhigayafarqiga u gaarka ah ee ballaaran iyo sifooyinka kale ee wanaagsan ee isku-dhafka hooseeya ee balaadhinta kulaylka, heerkulka shaqada sare, daadi kulaylka wanaagsan, beddelka hoose iyo khasaaraha korantada, tamar badan oo hufan, kororka kuleylka sare iyo xoogga burburka beerta koronto, iyo sidoo kale qulqulo badan oo xoog leh. xaalad.Silicon Carbide SiC at Western Minmetals (SC) Corporation waxaa lagu bixin karaa cabbirka 2" 3' 4" iyo 6" (50mm, 75mm, 100mm, 150mm) dhexroor, oo leh nooca n-n-ku-dahaaran ama wafer-ka-baxsan ee warshadaha iyo codsiga shaybaarka.Qeexitaan kasta oo la habeeyay ayaa loogu talagalay xalka ugu fiican macaamiishayada adduunka oo dhan.
Codsiyada
Tayada sare leh ee 4H / 6H Silicon Carbide SiC wafer waxay ku fiican tahay wax soo saarka kuwa badan oo goyn-goyn ah oo dhakhso badan, heerkul sare & aalado korantada sare leh sida Schottky diodes & SBD, MOSFETs & JFETs, iwm. sidoo kale walxo la jecel yahay oo ku jira cilmi baarista & horumarinta transistor-ka laba-cirifoodka ee dahaaran iyo thyristors.Sida walaxda jiilka cusub ee heersare ah, Silicon Carbide SiC wafer waxa kale oo ay u adeegtaa sida faafinta kulaylka hufan ee qaybaha tamarta sare leh ee LED-yada, ama sida substrate deggan oo caan ah oo kobcaya lakabka GaN si ay u door bidayso sahaminta sayniska ee mustaqbalka la beegsanayo.
Tilmaamaha Farsamada
Silicon Carbide SiCat Western Minmetals (SC) Corporation waxaa lagu bixin karaa cabbirka 2" 3' 4" iyo 6" (50mm, 75mm, 100mm, 150mm) dhexroor, oo leh nooca n-n, semi-insulating ama maraqa qashinka ee codsiga warshadaha iyo shaybaarka .Qeexitaan kasta oo la habeeyey ayaa loogu talagalay xalka ugu fiican ee macaamiisheena adduunka oo dhan.
Qaanuunka toosan | SiC |
Miisaanka Molecular | 40.1 |
Qaab dhismeedka crystal | Wurtzite |
Muuqashada | Adag |
Meesha dhalaalaysa | 3103 ± 40K |
Barta Karsan | N/A |
Cufnaanta 300K | 3.21 g/cm3 |
Farqiga Tamarta | (3.00-3.23) eV |
Iska caabin gudaha ah | > 1E5 Ω-cm |
Lambarka CAS | 409-21-2 |
Lambarka EC | 206-991-8 |
Maya | Walxaha | Tilmaamaha Heerka | |||
1 | Cabirka SiC | 2" | 3" | 4" | 6" |
2 | Dhexroor mm | 50.8 0.38 | 76.2 0.38 | 100 0.5 | 150 0.5 |
3 | Habka Kobaca | MOCVD | MOCVD | MOCVD | MOCVD |
4 | Nooca Anshaxa | 4H-N, 6H-N, 4H-SI, 6H-SI | |||
5 | Iska caabin Ω-cm | 0.015-0.028;0.02-0.1;>1E5 | |||
6 | Hanuuninta | 0°±0.5°;4.0° dhanka <1120> | |||
7 | Dhumucda μm | 330± 25 | 330± 25 | (350-500) ± 25 | (350-500) ± 25 |
8 | Goobta Guriga Hoose | <1-100>±5° | <1-100>±5° | <1-100>±5° | <1-100>±5° |
9 | Dhererka Guriga aasaasiga ah mm | 16± 1.7 | 22.2±3.2 | 32.5±2 | 47.5±2.5 |
10 | Goobta Guriga Sare | Silikoonka kor u kaca: 90°, saacadu u jeeddo dabaqa koowaad ±5.0° | |||
11 | Dhererka siman ee sare mm | 8± 1.7 | 11.2 ± 1.5 | 18±2 | 22± 2.5 |
12 | TTV μm max | 15 | 15 | 15 | 15 |
13 | Qaanso μm max | 40 | 40 | 40 | 40 |
14 | Warp μm max | 60 | 60 | 60 | 60 |
15 | Cidhifka ka saarida mm max | 1 | 2 | 3 | 3 |
16 | Cufnaanta Micropipe cm-2 | <5, warshadaha;<15, shaybaadhka;<50, hooyo | |||
17 | Kala guurid cm-2 | <3000, warshadaha;<20000, shaybaar;<500000, hooyo | |||
18 | Dusha sare ee Roughness nm max | 1 (Labadalay), 0.5 (CMP) | |||
19 | dildilaaca | Midna, darajada warshadaha | |||
20 | Taariko laba geesood ah | Midna, darajada warshadaha | |||
21 | xoqid | ≤3mm, dhererka guud ee ka yar dhexroorka substrate | |||
22 | Chips Edge | Midna, darajada warshadaha | |||
23 | Baakad | Weel kaliya oo wafer ah ayaa lagu xidhay bac aluminium ka kooban. |
Silicon Carbide SiC 4H/6HWafer tayo sare leh ayaa ku habboon soo saarista qalab badan oo heer sare ah oo heer sare ah oo dhakhso badan, heerkul sare & aaladaha elektiroonigga ah ee korantada sare sida Schottky diodes & SBD, MOSFETs & JFETs, iwm. cilmi baarista & horumarinta transistor-ka laba-cirifoodka ee dahaaran iyo thyristors.Sida walaxda jiilka cusub ee heersare ah, Silicon Carbide SiC wafer waxa kale oo ay u adeegtaa sida faafinta kulaylka hufan ee qaybaha tamarta sare leh ee LED-yada, ama sida substrate deggan oo caan ah oo kobcaya lakabka GaN si ay u door bidayso sahaminta sayniska ee mustaqbalka la beegsanayo.
Talooyin wax iibsiga
Silicon Carbide SiC